JPH0123545Y2 - - Google Patents

Info

Publication number
JPH0123545Y2
JPH0123545Y2 JP15375484U JP15375484U JPH0123545Y2 JP H0123545 Y2 JPH0123545 Y2 JP H0123545Y2 JP 15375484 U JP15375484 U JP 15375484U JP 15375484 U JP15375484 U JP 15375484U JP H0123545 Y2 JPH0123545 Y2 JP H0123545Y2
Authority
JP
Japan
Prior art keywords
opening
door
chamber
processing chamber
column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15375484U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6167838U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15375484U priority Critical patent/JPH0123545Y2/ja
Publication of JPS6167838U publication Critical patent/JPS6167838U/ja
Application granted granted Critical
Publication of JPH0123545Y2 publication Critical patent/JPH0123545Y2/ja
Expired legal-status Critical Current

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  • Devices For Use In Laboratory Experiments (AREA)
JP15375484U 1984-10-12 1984-10-12 Expired JPH0123545Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15375484U JPH0123545Y2 (en]) 1984-10-12 1984-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15375484U JPH0123545Y2 (en]) 1984-10-12 1984-10-12

Publications (2)

Publication Number Publication Date
JPS6167838U JPS6167838U (en]) 1986-05-09
JPH0123545Y2 true JPH0123545Y2 (en]) 1989-07-19

Family

ID=30711766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15375484U Expired JPH0123545Y2 (en]) 1984-10-12 1984-10-12

Country Status (1)

Country Link
JP (1) JPH0123545Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0418668Y2 (en]) * 1988-10-07 1992-04-27
JPH0444178Y2 (en]) * 1988-11-02 1992-10-19

Also Published As

Publication number Publication date
JPS6167838U (en]) 1986-05-09

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